Peer Reviewed Journal via three different mandatory reviewing processes, since 2006, and, from September 2020, a fourth mandatory peer-editing has been added.
Form testing interferometry permits a fast, non-tactile and full-
field quantitative phase imaging of components in ultra precise
manufacturing. To reduce the influence of vibrations under
manufacturing conditions, it is most common to use the FT-
based spatial carrier phase measurement technique (SCPM)
which requires only a single interferogram recording. The
utilization of a generalized, relatively new spatial phase-shifting
method operating in the position space opens up prospects for
reduced phase noise and less reconstruction errors of the
calculated phase-map under production conditions. Therefore
this phase-shifting technique is investigated for applicability in
machine integrated interferometric form testing of optical lenses.
A characterization of the algorithm and a comparison with the
commonly used FT-based algorithm is performed. As a
reference, measurements are carried out with a coordinate
measuring machine with nanometre accuracy.
